Fabrication of thick Pb(Zr,Ti)O3 (PZT) films by modified sol–gel methods for application in MEMS

in Journal of Micromechatronics
Restricted Access
Get Access to Full Text

Have an Access Token?



Enter your access token to activate and access content online.

Please login and go to your personal user account to enter your access token.



Help

Have Institutional Access?



Access content through your institution. Any other coaching guidance?



Connect

If the inline PDF is not rendering correctly, you can download the PDF file here.

Fabrication of thick Pb(Zr,Ti)O3 (PZT) films by modified sol–gel methods for application in MEMS

in Journal of Micromechatronics

Information

Content Metrics

Content Metrics

All Time Past Year Past 30 Days
Abstract Views 6 6 4
Full Text Views 26 26 22
PDF Downloads 2 2 0
EPUB Downloads 0 0 0